@misc{indiciae85532d64fea2,
  title = {Transport of Sputtered Particles in Capacitive Sputter Sources},
  author = {Jan Trieschmann and Thomas Mussenbrock},
  year = {2015},
  doi = {10.1063/1.4926878},
  url = {https://arxiv.org/abs/1505.02883},
  note = {Source identifier: 1505.02883}
}