TY  - RPRT
TI  - Transport of Sputtered Particles in Capacitive Sputter Sources
AU  - Jan Trieschmann
AU  - Thomas Mussenbrock
PY  - 2015
DO  - 10.1063/1.4926878
UR  - https://arxiv.org/abs/1505.02883
ID  - 1505.02883
ER  -