@misc{indiciae0b68d8bb8a48, title = {The origin of defects induced in ultra-pure germanium by Electron Beam Deposition}, author = {Sergio M. M. Coelho and Juan F. R. Archilla and F. Danie Auret and Jackie M. Nel}, year = {2015}, doi = {10.1007/978-3-319-21045-2\_15}, url = {https://arxiv.org/abs/1505.04279}, note = {Source identifier: 1505.04279} }