@misc{indiciae0e2aa5b2814a,
  title = {High-Q Tantalum Oxide Nanomechanical Resonators by Laser-Oxidation of TaSe2},
  author = {Santiago J. Cartamil-Bueno and Peter G. Steeneken and Frans D. Tichelaar and Efren Navarro-Moratalla and Warner J. Venstra and Ronald van Leeuwen and Eugenio Coronado and Herre S. J. van der Zant and Gary A. Steele and Andres Castellanos-Gomez},
  year = {2015},
  doi = {10.1007/s12274-015-0789-8},
  url = {https://arxiv.org/abs/1505.04727},
  note = {Source identifier: 1505.04727}
}