@misc{indiciae8d475f10f679, title = {Lossless Layout Image Compression Algorithms for Electron-Beam Direct-Write Lithography}, author = {Narendra Chaudhary and Yao Luo and Serap A. Savari and Roger McCay}, year = {2015}, doi = {10.1116/1.4927639}, url = {https://arxiv.org/abs/1505.06494}, note = {Source identifier: 1505.06494} }