TY  - RPRT
TI  - Lossless Layout Image Compression Algorithms for Electron-Beam Direct-Write Lithography
AU  - Narendra Chaudhary
AU  - Yao Luo
AU  - Serap A. Savari
AU  - Roger McCay
PY  - 2015
DO  - 10.1116/1.4927639
UR  - https://arxiv.org/abs/1505.06494
ID  - 1505.06494
ER  -