@misc{indiciae7ac7e2bf9dca,
  title = {Method to make a single-step etch mask for 3D monolithic nanostructures},
  author = {D. A. Grishina and C. A. M. Harteveld and L. A. Woldering and W. L. Vos},
  year = {2015},
  doi = {10.1088/0957-4484/26/50/505302},
  url = {https://arxiv.org/abs/1505.08035},
  note = {Source identifier: 1505.08035}
}