TY  - RPRT
TI  - Method to make a single-step etch mask for 3D monolithic nanostructures
AU  - D. A. Grishina
AU  - C. A. M. Harteveld
AU  - L. A. Woldering
AU  - W. L. Vos
PY  - 2015
DO  - 10.1088/0957-4484/26/50/505302
UR  - https://arxiv.org/abs/1505.08035
ID  - 1505.08035
ER  -