@misc{indiciae9dcc5777677c, title = {Manufacturing Pathway and Experimental Demonstration for Nanoscale Fine-Grained 3-D Integrated Circuit Fabric}, author = {Mostafizur Rahman and Jiajun Shi and Mingyu Li and Santosh Khasanvis and Csaba Andras Moritz}, year = {2015}, url = {https://arxiv.org/abs/1506.00286}, note = {Source identifier: 1506.00286} }