@misc{indiciaec57303a7f3aa,
  title = {Soft-mask fabrication of gallium arsenide nanomembranes for integrated quantum photonics},
  author = {Leonardo Midolo and Tommaso Pregnolato and Gabija Kiršanskė and Søren Stobbe},
  year = {2015},
  url = {https://arxiv.org/abs/1506.00376},
  note = {Source identifier: 1506.00376}
}