TY  - RPRT
TI  - Soft-mask fabrication of gallium arsenide nanomembranes for integrated quantum photonics
AU  - Leonardo Midolo
AU  - Tommaso Pregnolato
AU  - Gabija Kiršanskė
AU  - Søren Stobbe
PY  - 2015
UR  - https://arxiv.org/abs/1506.00376
ID  - 1506.00376
ER  -