@misc{indiciae12af047b23cf,
  title = {Evaluation of defect density by top-view large scale AFM on metamorphic structures grown by MOVPE},
  author = {Agnieszka Gocalinska and Marina Manganaro and Valeria Dimastrodonato and Emanuele Pelucchi},
  year = {2015},
  doi = {10.1016/j.apsusc.2015.05.070},
  url = {https://arxiv.org/abs/1506.01967},
  note = {Source identifier: 1506.01967}
}