@misc{indiciae8b0e01a4d17f,
  title = {RF plasma cleaning of optical surfaces: A study of cleaning rates on different carbon allotropes as a function of RF powers and distances},
  author = {M. González Cuxart and J. Reyes-Herrera and I. Šics and A. R. Goñi and H. Moreno Fernandez and V. Carlino and E. Pellegrin},
  year = {2015},
  doi = {10.1016/j.apsusc.2015.11.117},
  url = {https://arxiv.org/abs/1506.04280},
  note = {Source identifier: 1506.04280}
}