TY  - RPRT
TI  - RF plasma cleaning of optical surfaces: A study of cleaning rates on different carbon allotropes as a function of RF powers and distances
AU  - M. González Cuxart
AU  - J. Reyes-Herrera
AU  - I. Šics
AU  - A. R. Goñi
AU  - H. Moreno Fernandez
AU  - V. Carlino
AU  - E. Pellegrin
PY  - 2015
DO  - 10.1016/j.apsusc.2015.11.117
UR  - https://arxiv.org/abs/1506.04280
ID  - 1506.04280
ER  -