@misc{indiciae05043b3711de,
  title = {Self-bias Dependence on Process Parameters in Asymmetric Cylindrical Coaxial Capacitively Coupled Plasma},
  author = {J. Upadhyay and Do Im and S. Popović and A. -M. Valente-Feliciano and L. Phillips and L. Vušković},
  year = {2015},
  url = {https://arxiv.org/abs/1506.05167},
  note = {Source identifier: 1506.05167}
}