TY  - RPRT
TI  - Self-bias Dependence on Process Parameters in Asymmetric Cylindrical Coaxial Capacitively Coupled Plasma
AU  - J. Upadhyay
AU  - Do Im
AU  - S. Popović
AU  - A. -M. Valente-Feliciano
AU  - L. Phillips
AU  - L. Vušković
PY  - 2015
UR  - https://arxiv.org/abs/1506.05167
ID  - 1506.05167
ER  -