@misc{indiciaec67543561243,
  title = {In-Situ Low-Angle Cross Sectioning: Bevel Slope Flattening due to Self-Alignment Effects},
  author = {Uwe Scheithauer},
  year = {2015},
  doi = {10.1016/j.apsusc.2009.06.103},
  url = {https://arxiv.org/abs/1506.07533},
  note = {Source identifier: 1506.07533}
}