TY  - RPRT
TI  - In-Situ Low-Angle Cross Sectioning: Bevel Slope Flattening due to Self-Alignment Effects
AU  - Uwe Scheithauer
PY  - 2015
DO  - 10.1016/j.apsusc.2009.06.103
UR  - https://arxiv.org/abs/1506.07533
ID  - 1506.07533
ER  -