@misc{indiciae77ae4c7c62da,
  title = {Research on Pd film deposition rate calculation and simulation based on TiZrV/Pd film coating experiment},
  author = {Jie Wang and Bo Zhang and Yanhui Xu and Yong Wang},
  year = {2015},
  url = {https://arxiv.org/abs/1507.00409},
  note = {Source identifier: 1507.00409}
}