TY  - RPRT
TI  - Research on Pd film deposition rate calculation and simulation based on TiZrV/Pd film coating experiment
AU  - Jie Wang
AU  - Bo Zhang
AU  - Yanhui Xu
AU  - Yong Wang
PY  - 2015
UR  - https://arxiv.org/abs/1507.00409
ID  - 1507.00409
ER  -