@misc{indiciae8354a70f456f,
  title = {Effect of Low-Damage Inductively Coupled Plasma on Shallow NV Centers in Diamond},
  author = {Felipe Fávaro de Oliveira and S. Ali Momenzadeh and Ya Wang and Mitsuharu Konuma and Matthew Markham and Andrew M. Edmonds and Andrej Denisenko and Jörg Wrachtrup},
  year = {2015},
  doi = {10.1063/1.4929356},
  url = {https://arxiv.org/abs/1507.00890},
  note = {Source identifier: 1507.00890}
}