@misc{indiciaeaf197c2ea7ee,
  title = {Numerical and experimental studies of the carbon etching in EUV-induced plasma},
  author = {D. I. Astakhov and W. J. Goedheer and C. J. Lee and V. V. Ivanov and V. M. Krivtsun and O. Yakushev and K. N. Koshelev and D. V. Lopaev and F. Bijkerk},
  year = {2016},
  url = {https://arxiv.org/abs/1507.02705},
  note = {Source identifier: 1507.02705}
}