@misc{indiciae47cdf8e1c37d,
  title = {Influence of ionisation zone motion in high power impulse magnetron sputtering on angular ion flux and NbO\$\_x\$ film growth},
  author = {Robert Franz and César Clavero and Jonathan Kolbeck and André Anders},
  year = {2015},
  doi = {10.1088/0963-0252/25/1/015022},
  url = {https://arxiv.org/abs/1507.04498},
  note = {Source identifier: 1507.04498}
}