TY  - RPRT
TI  - Influence of ionisation zone motion in high power impulse magnetron sputtering on angular ion flux and NbO$_x$ film growth
AU  - Robert Franz
AU  - César Clavero
AU  - Jonathan Kolbeck
AU  - André Anders
PY  - 2015
DO  - 10.1088/0963-0252/25/1/015022
UR  - https://arxiv.org/abs/1507.04498
ID  - 1507.04498
ER  -