@misc{indiciae4fe399406a2c, title = {Kinetic Interpretation of Resonance Phenomena in Low Pressure Capacitively Coupled Radio Frequency Plasmas}, author = {S. Wilczek and J. Trieschmann and D. Eremin and R. P. Brinkmann and J. Schulze and E. Schuengel and A. Derzsi and I. Korolov and P. Hartmann and Z. Donkó and T. Mussenbrock}, year = {2015}, doi = {10.1063/1.4953432}, url = {https://arxiv.org/abs/1507.05505}, note = {Source identifier: 1507.05505} }