@misc{indiciae40ec2728208b,
  title = {Reduction of residual stress in AlN thin Films synthesized by magnetron sputtering technique},
  author = {Padmalochan Panda and R. Ramaseshan and N Ravi and G. Mangamma and Feby Jose and S. Dash and K. Suzuki and H. Suematsu},
  year = {2016},
  doi = {10.1016/j.matchemphys.2017.07.072},
  url = {https://arxiv.org/abs/1507.08113},
  note = {Source identifier: 1507.08113}
}