TY  - RPRT
TI  - Reduction of residual stress in AlN thin Films synthesized by magnetron sputtering technique
AU  - Padmalochan Panda
AU  - R. Ramaseshan
AU  - N Ravi
AU  - G. Mangamma
AU  - Feby Jose
AU  - S. Dash
AU  - K. Suzuki
AU  - H. Suematsu
PY  - 2016
DO  - 10.1016/j.matchemphys.2017.07.072
UR  - https://arxiv.org/abs/1507.08113
ID  - 1507.08113
ER  -