@misc{indiciae7ff750a9bc50,
  title = {Thermodynamics of Deposition Flux dependent Intrinsic Film Stress},
  author = {Amirmehdi Saedi and Marcel J. Rost},
  year = {2015},
  doi = {10.1038/ncomms10733},
  url = {https://arxiv.org/abs/1508.04059},
  note = {Source identifier: 1508.04059}
}