TY  - RPRT
TI  - Thermodynamics of Deposition Flux dependent Intrinsic Film Stress
AU  - Amirmehdi Saedi
AU  - Marcel J. Rost
PY  - 2015
DO  - 10.1038/ncomms10733
UR  - https://arxiv.org/abs/1508.04059
ID  - 1508.04059
ER  -