@misc{indiciae88e94fdfeca9,
  title = {Sputtering based epitaxial growth and modeling of Cu/Si thin films},
  author = {A. S. Bhattacharyya and S. Kumar and S. Jana and P. Y. Kommu and K. Gaurav and S. Prabha and V. S. Kujur and P. Bharadwaj},
  year = {2015},
  doi = {10.12785/ijtfst/040303},
  url = {https://arxiv.org/abs/1508.04920},
  note = {Source identifier: 1508.04920}
}