@misc{indiciae074b4ab0a49d,
  title = {Atomic layer deposited second order nonlinear optical metamaterial for back-end integration with CMOS-compatible nanophotonic circuitry},
  author = {StÉphane Clemmen and Artur Hermans and Eduardo Solano and Jolien Dendooven and Kalle Koskinen and Martti Kauranen and Edouard Brainis and Christophe Detavernier and Roel Baets},
  year = {2015},
  doi = {10.1364/ol.40.005371},
  url = {https://arxiv.org/abs/1508.05275},
  note = {Source identifier: 1508.05275}
}