TY - RPRT TI - Low-background temperature sensors fabricated on parylene substrates AU - A. Dhar AU - J. C. Loach AU - P. J. Barton AU - J. T. Larsen AU - A. W. P. Poon PY - 2015 DO - 10.1088/1748-0221/10/12/p12002 UR - https://arxiv.org/abs/1508.05757 ID - 1508.05757 ER -