@misc{indiciaeb69ab7176d5e, title = {Planar multilayer circuit quantum electrodynamics}, author = {Z. K. Minev and K. Serniak and I. M. Pop and Z. Leghtas and K. Sliwa and M. Hatridge and L. Frunzio and R. J. Schoelkopf and M. H. Devoret}, year = {2016}, doi = {10.1103/physrevapplied.5.044021}, url = {https://arxiv.org/abs/1509.01619}, note = {Source identifier: 1509.01619} }