TY - RPRT TI - Characterization of multilayer stack parameters from X-ray reflectivity data using the PPM program: measurements and comparison with TEM results AU - D. Spiga AU - A. Mirone AU - G. Pareschi AU - R. Canestrari AU - V. Cotroneo AU - C. Ferrari AU - C. Ferrero AU - L. Lazzarini AU - D. Vernani PY - 2015 DO - 10.1117/12.672895 UR - https://arxiv.org/abs/1509.02264 ID - 1509.02264 ER -