@misc{indiciaeeba254573ccc,
  title = {Variable-spot ion beam figuring},
  author = {Lixiang Wu and Keqiang Qiu and Shaojun Fu},
  year = {2016},
  doi = {10.1016/j.nimb.2016.01.009},
  url = {https://arxiv.org/abs/1509.02499},
  note = {Source identifier: 1509.02499}
}