TY  - RPRT
TI  - Variable-spot ion beam figuring
AU  - Lixiang Wu
AU  - Keqiang Qiu
AU  - Shaojun Fu
PY  - 2016
DO  - 10.1016/j.nimb.2016.01.009
UR  - https://arxiv.org/abs/1509.02499
ID  - 1509.02499
ER  -