@misc{indiciae7ae7d69e7482,
  title = {Optimization of Spatial Dose Distribution for Controlling Sidewall Shape in Electron-beam Lithography},
  author = {Pengcheng Li},
  year = {2015},
  url = {https://arxiv.org/abs/1509.04694},
  note = {Source identifier: 1509.04694}
}