@misc{indiciaeb60238298e29,
  title = {Advanced Fabrication Processes for Superconducting Very Large Scale Integrated Circuits},
  author = {Sergey K. Tolpygo and Vladimir Bolkhovsky and T. J. Weir and Alex Wynn and D. E. Oates and L. M. Johnson and M. A. Gouker},
  year = {2016},
  doi = {10.1109/tasc.2016.2519388},
  url = {https://arxiv.org/abs/1509.05081},
  note = {Source identifier: 1509.05081}
}