TY  - RPRT
TI  - Advanced Fabrication Processes for Superconducting Very Large Scale Integrated Circuits
AU  - Sergey K. Tolpygo
AU  - Vladimir Bolkhovsky
AU  - T. J. Weir
AU  - Alex Wynn
AU  - D. E. Oates
AU  - L. M. Johnson
AU  - M. A. Gouker
PY  - 2016
DO  - 10.1109/tasc.2016.2519388
UR  - https://arxiv.org/abs/1509.05081
ID  - 1509.05081
ER  -