@misc{indiciae6b177fc9fac9,
  title = {Imaging Scatterometry},
  author = {Morten Hannibal Madsen and Poul-Erik Hansen},
  year = {2015},
  doi = {10.1364/oe.24.001109},
  url = {https://arxiv.org/abs/1509.05613},
  note = {Source identifier: 1509.05613}
}