@misc{indiciae678e9c806f8f,
  title = {Process stabilization by peak current regulation in reactive high-power impulse magnetron sputtering of hafnium nitride},
  author = {T. Shimizu and M. Villamayor and D. Lundin and U. Helmersson},
  year = {2015},
  doi = {10.1088/0022-3727/49/6/065202},
  url = {https://arxiv.org/abs/1509.07002},
  note = {Source identifier: 1509.07002}
}