TY  - RPRT
TI  - Alignment free characterization of 2D gratings
AU  - Morten Hannibal Madsen
AU  - Pierre Boher
AU  - Poul-Erik Hansen
AU  - Jan Friis Jørgensen
PY  - 2015
DO  - 10.1364/ao.55.000317
UR  - https://arxiv.org/abs/1509.07623
ID  - 1509.07623
ER  -