TY - RPRT TI - The thermal stability and separation characteristic of anti-sticking layers of Pt/Cr films for hot slumping technology AU - Shuang Ma AU - Mingwu Wen AU - Zhanshan Wang PY - 2015 DO - 10.1088/1674-1137/40/7/079001 UR - https://arxiv.org/abs/1509.08673 ID - 1509.08673 ER -