@misc{indiciae57bd87579c5c,
  title = {Amplitude and phase beam shaping for the highest sensitivity in side-wall angle detection},
  author = {Luca Cisotto and Paul H. Urbach},
  year = {2015},
  url = {https://arxiv.org/abs/1509.09142},
  note = {Source identifier: 1509.09142}
}