@misc{indiciae8adc2e522a62,
  title = {XPS studies on AlN thin films grown by ion beam sputtering in reactive assistance of N+/N2+ ions: Substrate temperature induced compositional variations},
  author = {Neha Sharma and S. Ilango and S. Dash and A. K. Tyagi},
  year = {2015},
  url = {https://arxiv.org/abs/1510.00541},
  note = {Source identifier: 1510.00541}
}