TY  - RPRT
TI  - XPS studies on AlN thin films grown by ion beam sputtering in reactive assistance of N+/N2+ ions: Substrate temperature induced compositional variations
AU  - Neha Sharma
AU  - S. Ilango
AU  - S. Dash
AU  - A. K. Tyagi
PY  - 2015
UR  - https://arxiv.org/abs/1510.00541
ID  - 1510.00541
ER  -