@misc{indiciae21ba8d30d5ec,
  title = {Uniform non-stoichiometric titanium nitride thin films for improved kinetic inductance detector array},
  author = {G. Coiffard and K-F. Schuster and E. F. C. Driessen and S. Pignard and M. Calvo and A. Catalano and J. Goupy and A. Monfardini},
  year = {2016},
  doi = {10.1007/s10909-016-1489-9},
  url = {https://arxiv.org/abs/1510.01876},
  note = {Source identifier: 1510.01876}
}