@misc{indiciae3dac323ad248,
  title = {VUV irradiance measurement of a 2.45 GHz microwave-driven hydrogen discharge},
  author = {J. Komppula and O. Tarvainen and T. Kalvas and H. Koivisto and R. Kronholm and J. Laulainen and P. Myllyperkiö},
  year = {2015},
  doi = {10.1088/0022-3727/48/36/365201},
  url = {https://arxiv.org/abs/1510.02246},
  note = {Source identifier: 1510.02246}
}