@misc{indiciae07e146d99434,
  title = {Nanometer scale elemental analysis in the helium ion microscope using time of flight spectrometry},
  author = {Nico Klingner and René Heller and Gregor Hlawacek and Johannes von Borany and John Notte and Jason Huang and Stefan Facsko},
  year = {2015},
  doi = {10.1016/j.ultramic.2015.12.005},
  url = {https://arxiv.org/abs/1510.04594},
  note = {Source identifier: 1510.04594}
}