TY  - RPRT
TI  - Nanometer scale elemental analysis in the helium ion microscope using time of flight spectrometry
AU  - Nico Klingner
AU  - René Heller
AU  - Gregor Hlawacek
AU  - Johannes von Borany
AU  - John Notte
AU  - Jason Huang
AU  - Stefan Facsko
PY  - 2015
DO  - 10.1016/j.ultramic.2015.12.005
UR  - https://arxiv.org/abs/1510.04594
ID  - 1510.04594
ER  -